Interferometric optical microscopy of subwavelength grooves

Author:

Morgan S.P.,Choi E.,Somekh M.G.,See C.W.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Physical and Theoretical Chemistry,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

Reference28 articles.

1. Introduction to Fourier Optics;Goodman,1996

2. Theory and Practice of Scanning Optical Microscopy;Wilson,1984

3. Depth discrimination in scanned heterodyne microscope systems;Somekh;J. Microscopy,1992

4. Theory of optical edge detection and imaging of thick layers;Nyyssonen;J. Opt. Soc. Am. A,1982

5. Optical microscope imaging of lines patterned in thick layers with variable edge geometry;Nyyssonen;J. Opt. Soc. Am. A,1988

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