Determination of parameter error area in ellipsometry of superthin and `little contrasting' layers
Author:
Publisher
Elsevier BV
Subject
Electrical and Electronic Engineering,Physical and Theoretical Chemistry,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
Reference15 articles.
1. Parameter-Correlation and Computational Considerations in Multiple-Angle Ellipsometry*
2. R.M.A. Azzam, N.M. Bashara, Ellipsometry and Polarized Light, North-Holland, Amsterdam, 1977.
3. Parameter correlation and precision in multiple-angle ellipsometry
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