Shrinkage of SU-8 microstructures during carbonization
Author:
Funder
MicroPhotonics Fabrication Facility in Clemson University
Publisher
Elsevier BV
Subject
Analytical Chemistry,Fuel Technology
Reference77 articles.
1. Electrical properties of glassy-carbon electrodes;Shigemitsu;Med. Biol. Eng. Comput.,1979
2. Glassy carbon as electrode material in electro-analytical chemistry;Van der Linde;Anal. Chim. Acta,1980
3. Electrochemical studies of carbon films from pyrolyzed photoresist;Kim;J. Electrochem. Soc.,1998
4. Exploration of variables in the fabrication of pyrolysed photoresist;Fairman;J. Solid State Electrochem.,2008
5. Carbon microelectromechanical systems as a substratum for cell growth;Teixidor;Biomed. Mater.,2008
Cited by 50 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Fabrication of pyrolytic carbon interdigitated microelectrodes by maskless UV photolithography with epoxy-based photoresists SU-8 and mr-DWL;Micro and Nano Engineering;2024-06
2. Thermal Stability of SU-8 Low-Loss Optical Coupling Interconnects at 850 nm;IEEE Photonics Technology Letters;2024-02-01
3. Area-selective chalcogenization of transition metals through graphene mask;2D Materials;2024-01-12
4. Microarchitected Compliant Scaffolds of Pyrolytic Carbon for 3D Muscle Cell Growth;Advanced Healthcare Materials;2024-01-02
5. In Situ Pyrolysis of 3D Printed Building Blocks for Functional Nanoscale Metamaterials;Advanced Functional Materials;2023-07-08
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3