Raman study of structural order of a-SiNx:H and its change upon thermal annealing
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Condensed Matter Physics,Ceramics and Composites,Electronic, Optical and Magnetic Materials
Reference22 articles.
1. Optical properties, statistics of bond angle deformations and density of states in Si-rich a-SiNx:H alloys
2. The crystalline properties of nitrogen doped hydrogenated microcrystalline silicon thin films
3. Raman study of silicon nanocrystals formed in SiNx films by excimer laser or thermal annealing
4. Structural and conductivity change caused by N, O and C incorporation in a-Si:H
5. Effect of Annealing on Photoluminescence Spectra and Film Structure in a-SiN x:H
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