Hardware and software systems for the determination of charged particle parameters in low pressure plasmas using impedance-tuned Langmuir probes
Author:
Publisher
Elsevier BV
Subject
Spectroscopy,Instrumentation,Atomic and Molecular Physics, and Optics,Analytical Chemistry
Reference29 articles.
1. Use of a cylindrical Langmuir probe for the characterization of charged particle populations in a planar, diode glow discharge device
2. Design and evaluation of a computer controlled Langmuir probe system for glow discharge plasma diagnostics
3. Application of a tuned Langmuir probe for the diagnostic study of radio frequency glow discharges: instrumentation and theory
4. Langmuir probe study of the charged particle characteristics in an analytical radio frequency-glow discharge. Roles of discharge conditions and sample conductivity
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