1. The effect of CO cylinder materials on wafer contamination;Cooper;Semicond. Int.,1997
2. Contamination control in Si ULSI-technology at the 1011 cm−3 level and below;Bergholz;Solid State Phen.,1991
3. The cylinder’s impact on metal impurities in CO;Anderson;Semicond. Int.,1998
4. Fe(CO)5 in CO cylinders;Haynes;Chem. Br.,1992
5. D.N. Vassallo, T. Jacksier, Quantification of iron pentacarbonyl in carbon monoxide by FTIR, presented at the Pittsburgh Conference on Analytical Chemistry and Exposition, New Orleans, March 1998, paper 1226.