Efficient aerosol assisted delivery of low-volatility precursor for CVD applications

Author:

Pasin Laila,Meyer Jörg,Eiche Elisabeth,Weis FrederikORCID,Kasper Gerhard

Publisher

Elsevier BV

Subject

Pollution,Atmospheric Science,Fluid Flow and Transfer Processes,Mechanical Engineering,Environmental Engineering

Reference38 articles.

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2. Solar energy materials & solar cells solar grade silicon: Technology status and industrial trends;Bye;Solar Energy Materials and Solar Cells,2014

3. Special issue on aerosol-assisted chemical vapor deposition;Choy;Chemical Vapor Deposition,2006

4. Devi, A., Fischer, R., Parala, H., Allendorf, A. H. M. (2005). EUROCVD 15. In Proceedings of the fifteenth European conference on chemical vapor deposition:International Symposium. Pennington, NJ: The Electrochemical society, INC.

5. Synthesis of nanostructured Pt/oxide catalyst particles by MOCVD process at ambient pressure;Faust;Surface and Coatings Technology,2013

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