Modified fourier transform profilometry for the measurement of 3-D steep shapes
Author:
Publisher
Elsevier BV
Subject
Electrical and Electronic Engineering,Mechanical Engineering,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
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3. Recent advances in interferometric optical testing;Wyant;Laser Focus/Electro-Opt.,1985
4. Installation et utilisation du comparateur photoelectrique et interferentiel du Bureau International des Poids et Mesures;Carre;Metrologia,1966
5. Digital wave-front measuring interferometry: some systematic error source;Schweider;Appl. Opt.,1983
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