Automatic recognition and evaluation of micro-contaminant particles on ultra-smooth optical substrates using image analysis method-Reference-Cited by-同舟云学术

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Automatic recognition and evaluation of micro-contaminant particles on ultra-smooth optical substrates using image analysis method

Published:2004-06 Issue:6 Volume:41 Page:901-917
ISSN:0143-8166
Container-title:Optics and Lasers in Engineering
language:en
Short-container-title:Optics and Lasers in Engineering

Author:

Shi X.K,Hua M,Cheung E.H.M,Li M,Yuan W.Z

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Mechanical Engineering,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

Reference16 articles.

1. Particle size measurement;Allen,1997

2. Stanley-Wood NG, Lines RW. Particle size analysis Cambridge: Royal Society of Chemistry, 1992.

3. Particle size distribution III: assessment and characterization;Theodore,1998

4. Particle size analysis: classification and sedimentation methods;Bernhardt,1994

5. Principles, methods, and application of particle size analysis;Syvitski,1991

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