A method for the diffractive microrelief formation using the layered photoresist growth

Author:

Volkov A.V,Kazanskiy N.L,Moiseyev O.Ju,Soifer V.A

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Mechanical Engineering,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

Reference10 articles.

1. Computer optics;Sisakyan;J. Comput. Opt.,1987

2. Unique applications of computer-generated diffractive optical elements;Morkry;Proc. SPIE.,1989

3. Diffractive optics;Leger;Appl. Opt.,1995

4. Materials and methods for the fabrication of planar focusing components;Popov;Comput. Opt.,1987

5. Capabilities of microelectronic technologies for fabricating computer optics elements;Aristov;Comput. Opt,1989

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