Author:
Ishikawa Kazuhiko,Yamano Hitomi,Kagawa Ki-ichiro,Asada Katsuhiko,Iwata Koichi,Ueda Masahiro
Subject
Electrical and Electronic Engineering,Mechanical Engineering,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
Reference6 articles.
1. Heavens OS. In: Optical properties of thin solid films. New York, Dover, vol. 96, 1991. p. 103.
2. Spectroscopic ellipsometry. A user's guide;Tompkins,1999
3. Simultaneous determination of thickness and optical constants of polymer thin film by analyzing transmittance
4. Kondou M. Patent 2001-153619 (in Japan).
5. Haruna M. Patent 2001-141652(in Japan).
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