Influence of RF power and CH4 flow rate on properties of diamond-like carbon films deposited by PECVD technique-Reference-Cited by-同舟云学术

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Influence of RF power and CH4 flow rate on properties of diamond-like carbon films deposited by PECVD technique

Published:2020-11 Issue: Volume:176 Page:109073
ISSN:0969-806X
Container-title:Radiation Physics and Chemistry
language:en
Short-container-title:Radiation Physics and Chemistry

Author:

Chunjaemsri Thanun,Chongsereecharoen Ekachai,Chanlek Narong,Kidkhunthod Pinit,Nakajima Hideki,Tunmee Sarayut,Yimnirun Rattikorn,Rujirawat Saroj

Funder

NANOTEC

NSTDA

Ministry of Science and Technology, Thailand

Synchrotron Light Research Institute

Publisher

Elsevier BV

Subject

Radiation

Reference29 articles.

1. Study of human serum albumin adsorption and conformational change on DLC and silicon doped DLC using XPS and FTIR spectroscopy;Ahmed;J. Biomaterials Nanobiotechnol.,2013

2. Characterizing various types of defects in nuclear graphite using Raman scattering: heat treatment, ion irradiation and polishing;Ammar;Carbon,2015

3. History of diamond-like carbon films—from first experiments to worldwide applications;Bewilogua;Surf. Coating. Technol.,2014

4. Silver-doped nanocomposite carbon coatings (Ag-DLC) for biomedical applications–physiochemical and biological evaluation;Bociaga;Appl. Surf. Sci.,2015

5. Single crystal 6H‐SiC (0001) by XPS;Bozack;Surf. Sci. Spectra,1994

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