Subject
Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry
Cited by
128 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Foundations of physical vapor deposition with plasma assistance;Plasma Sources Science and Technology;2022-08-01
2. Physics and technology of magnetron sputtering discharges;Plasma Sources Science and Technology;2020-11-01
3. Introduction to magnetron sputtering;High Power Impulse Magnetron Sputtering;2020
4. Nonevaporable getter coating chambers for extreme high vacuum;Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films;2018-05
5. Foundations of DC plasma sources;Plasma Sources Science and Technology;2017-11-08