TRIM-DYNAMIC applied to marker broadening and SIMS depth profiling
Author:
Publisher
Elsevier BV
Subject
Instrumentation,Nuclear and High Energy Physics
Reference18 articles.
1. Ion-induced silicide formation in niobium thin films
2. Ion beam mixing in amorphous silicon I. Experimental investigation
3. Comparison of ion beam mixing at room temperature and 40 K
4. Ion mixing in Al, Si, and their oxides
5. Ion mixing of markers in SiO2and Si
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