Behaviors of hydrogen in C–SiC films with IR and SIMS analyses
Author:
Publisher
Elsevier BV
Subject
Instrumentation,Nuclear and High Energy Physics
Reference10 articles.
1. Tritium migration in vapor-deposited β-silicon carbide
2. Multifunction equipment combining ion, electron and atom beams
3. Spectroscopic characterization of thermally treated carbon-rich Si1−xCx films
4. X-ray photoelectron spectroscopy studies of the surface of ion-beam reactive sputter deposited zirconia films
5. Compositional and structural properties of hydrogenated amorphous silicon-carbon films prepared by ultra-high-vacuum plasma-enhanced chemical vapour deposition with different carbon sources
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