Molecular weight distribution and solubility changes in ion-bombarded polystyrene-Reference-Cited by-同舟云学术

Molecular weight distribution and solubility changes in ion-bombarded polystyrene

Published:1987-01 Issue: Volume:19-20 Page:865-871
ISSN:0168-583X
Container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
language:en
Short-container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

Author:

Puglisi Orazio,Licciardello Antonio,Calcagno Lucia,Foti Gaetano

Publisher

Elsevier BV

Subject

Instrumentation,Nuclear and High Energy Physics

Reference14 articles.

5. Introduction to Microlithography;Willson,1983

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