Subject
Instrumentation,Nuclear and High Energy Physics
Reference70 articles.
1. II. The energy spectrum of ejected atoms during the high energy sputtering of gold
2. Theory of Sputtering. I. Sputtering Yield of Amorphous and Polycrystalline Targets
3. P. Sigmund, in: R.Behrisch (Ed.), Sputtering by Particle Bombardment I, Top. Appl. Phys. vol. 47, Springer, Berlin, 1981, p. 9
4. Y. Yamamura, T. Takiguchi, H. Tawara, Data Compilation of Angular Distributions of Sputtered Atoms, Report NIFS-Data-1 (1990) 1
Cited by
26 articles.
订阅此论文施引文献
订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. Angular distribution of titanium ions and neutrals in high-power
impulse magnetron sputtering discharges;Journal of Vacuum Science & Technology A;2023-04-25
2. Angular distribution of sputtered particles from Inconel718: a simulation study;The European Physical Journal Applied Physics;2023
3. Influence of surface corrugation on the sputtering of carbon materials under high-fluence ion bombardment;Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques;2016-03
4. Relief evolution of HOPG under high-fluence 30keV argon ion irradiation;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2015-07
5. Sputtering of amorphous Si in the regime of ripple surface topography;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2013-12