Surface treatment of diamond films with Ar and O2 cluster ion beams
Author:
Publisher
Elsevier BV
Subject
Instrumentation,Nuclear and High Energy Physics
Reference14 articles.
1. Status of diamond as membrane material for X-ray lithography masks
2. Study on the polishing of chemically vapour deposited diamond film
3. Planarization of diamond thin film surfaces by ion beam etching at grazing incidence angle
4. Ion beam smoothing of CVD diamond thin films by etchback method
5. ECR plasma polishing of CVD diamond films
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2. Polishing of CVD Diamond for Direct Bonding Using Ar and SF6-Gas Cluster Ion Beams;2023 IEEE CPMT Symposium Japan (ICSJ);2023-11-15
3. High aspect (>20) etching with reactive gas cluster injection;Japanese Journal of Applied Physics;2022-06-13
4. Polishing Diamond Substrates using Gas Cluster Ion Beam (GCIB) Irradiation for the Direct Bonding to Power Devices;2022 International Conference on Electronics Packaging (ICEP);2022-05-11
5. Optical Quality Laser Polishing of CVD Diamond by UV Pulsed Laser Irradiation;Advanced Optical Materials;2021-08-20
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