1. High rate reactive dc magnetron sputter deposition of Al2O3 films
2. M. Ikeyama, K. Saitoh, H. Niwa, S. Nakao, Y. Miyagawa, S. Miyagawa, in: Proceedings of the 6th Sino-Japan Symposium on Ion Surface Optimization of Materials, 1993, Tsukuba, 1993, p. 88
3. M. Ikeyama, K. Saitoh, H. Niwa, S. Nakao, Y. Miyagawa, S. Miyagawa, in: Proceedings of the 1st Meeting on IESJ’92, Tokyo, 1992, p. 161
4. An improved technique for determining hardness and elastic modulus using load and displacement sensing indentation experiments
5. J. F. Ziegler, J. P. Birsack, U. Littmark, The Stopping and Range of Ions in Solids, Pergamon, New York, 1985