Micro-RBS characterisation of the chemical composition and particulate deposition on pulsed laser deposited Si1−xGex thin films

Author:

Simon A.,Kántor Z.

Publisher

Elsevier BV

Subject

Instrumentation,Nuclear and High Energy Physics

Reference20 articles.

1. Pulsed Laser Deposition of Thin Films,1994

2. Stoichiometry issues in pulsed-laser deposition of alloys grown from multicomponent targets

3. Laser Ablation of Electronic Materials;Perrière,1992

4. Plasma properties and stoichiometry of laser-deposited BiSrCaCuO thin films

5. Particulates generated by pulsed laser ablation;Chen,1994

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