Sputtering of copper atoms by keV atomic and molecular ions: A comparison of experiment with analytical and computer based models-Reference-Cited by-同舟云学术

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Sputtering of copper atoms by keV atomic and molecular ions: A comparison of experiment with analytical and computer based models

Published:2002-10 Issue:4 Volume:194 Page:409-416
ISSN:0168-583X
Container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
language:en
Short-container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

Author:

Gillen D.R.,Graham W.G.,Goelich A

Publisher

Elsevier BV

Subject

Instrumentation,Nuclear and High Energy Physics

Reference14 articles.

1. Energy Distribution of Atoms Sputtered from Polycrystalline Metals

2. Energy dependence of the ionization probability of sputtered Cu and Ni

3. Energy distributions of neutral atoms sputtered by very low energy heavy ions

4. Yields and kinetic energy distributions of sputtered neutral copper clusters

5. Energy distributions of copper ions and atoms sputtered by atomic and molecular ions

Cited by 4 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. The lunar exosphere: The sputtering contribution;Icarus;2007-11

2. Monte Carlo simulation of the PVD transport process for alloys;Surface and Coatings Technology;2005-10

3. Transport theories of sputtering;Philosophical Transactions of the Royal Society of London. Series A: Mathematical, Physical and Engineering Sciences;2003-11-25

4. Energy and Angular Distributions of Sputtered Species;Topics in Applied Physics

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