A new method for inner surface modification by plasma source ion implantation (PSII)
Author:
Publisher
Elsevier BV
Subject
Instrumentation,Nuclear and High Energy Physics
Reference7 articles.
1. Plasma source ion‐implantation technique for surface modification of materials
2. Repetitively pulsed metal ion beams for ion implantation
3. New method of tubular material inner surface modification by plasma source ion implantation
4. Improving the plasma immersion ion implantation impact energy inside a cylindrical bore by using an auxiliary electrode
5. Dose and energy uniformity over inner surface in plasma immersion ion implantation
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