Ion current extracted from a self ignition plasma around the target immersed in a pulsed rf ICP methane plasma-Reference-Cited by-同舟云学术

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Ion current extracted from a self ignition plasma around the target immersed in a pulsed rf ICP methane plasma

Published:2003-05 Issue: Volume:206 Page:817-819
ISSN:0168-583X
Container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
language:en
Short-container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

Author:

Tanaka Takeshi,Watanabe Satoshi,Mizuno Giichiro,Takagi Toshinori,Yoshida Mitsuhiro,Horibe Hiroshi,Yukimura Ken

Publisher

Elsevier BV

Subject

Instrumentation,Nuclear and High Energy Physics

Reference2 articles.

1. Sheath thickness and potential profiles of ion‐matrix sheaths for cylindrical and spherical electrodes

2. Diamondlike carbon deposition on plastic films by plasma source ion implantation

Cited by 2 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Generation of self-ignition plasma and extracted ion current in a burst RF inductively coupled plasma of carbon-containing gases;Surface and Coatings Technology;2004-08

2. Estimation of plasma density in after-glow region of RF burst plasma based on voltage–current characteristics;Surface and Coatings Technology;2004-08

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