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Interfacial structure control of cubic boron nitride films prepared by ion-beam assisted deposition

  • Published:1997-05 Issue: Volume:127-128 Page:851-856
  • ISSN:0168-583X
  • Container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
  • language:en
  • Short-container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

Author:

Setsuhara Y.,Suzuki T.,Tanaka Y.,Miyake S.,Suzuki M.,Kumagai M.,Ogata K.,Kohata M.,Higeta K.,Einishi T.,Suzuki Y.,Shimoitani Y.,Motonami Y.

Publisher

Elsevier BV

Subject

Instrumentation,Nuclear and High Energy Physics

Cited by 14 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Structural, mechanical, and electrical properties of cubic boron nitride thin films deposited by magnetically enhanced plasma ion plating method;Japanese Journal of Applied Physics;2014-01-01

2. Significant stress reduction of cBN layers upon ion irradiation at elevated temperatures;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2012-06

3. Synthesis and Mechanical Properties of Cubic Boron Nitride /Nanodiamond Composite Films;Chemical Vapor Deposition;2006-01

4. CBN-TiN Composite Coating Using a Novel Combinatorial Method—Structure and Performance in Metal Cutting;Journal of Manufacturing Science and Engineering;2003-07-23

5. Mechanical properties of zirconium films prepared by ion-beam assisted deposition;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2003-05
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