Lithography for semiconductor technology-Reference-Cited by-同舟云学术

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Lithography for semiconductor technology

Published:1997-08 Issue:1-4 Volume:131 Page:22-29
ISSN:0168-583X
Container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
language:en
Short-container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

Author:

Ngô Christian,Rosilio Charles

Publisher

Elsevier BV

Subject

Instrumentation,Nuclear and High Energy Physics

Reference18 articles.

1. Recherches en microtechniques: réalités et perpectives. Collection du livre vert,1991

2. Nanoscience and nanotechnology in Europe

3. NATO ASI Series;Hohn,1994

4. The Quantum dot, a journey into the future of microelectronics;Turton,1995

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