Low energy ion assisted carbon film growth: methods and mechanisms
Author:
Publisher
Elsevier BV
Subject
Instrumentation,Nuclear and High Energy Physics
Reference39 articles.
1. Ion‐Beam Deposition of Thin Films of Diamondlike Carbon
2. Preparation and structure of carbon film deposited by a mass‐separated C+ion beam
3. Transparent carbon film prepared by mass‐separated negative‐carbon‐ion‐beam deposition
4. Abrasive wear resistance of ion‐deposited hard‐carbon films as a function of deposition energy
5. Subplantation model for film growth from hyperthermal species: Application to diamond
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