High energy metal ion implantation using a novel, broad-beam, Marx-generator-based ion source “Magis”
Author:
Publisher
Elsevier BV
Subject
Instrumentation,Nuclear and High Energy Physics
Reference16 articles.
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3. Some observations of the effect of magnetic field and arc current on the vacuum arc ion charge state distribution
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3. High temperature wettability of ion implanted multicomponent CrAlSiN films by molten glass;Surface and Coatings Technology;2013-12
4. The evolution of ion charge states in cathodic vacuum arc plasmas: a review;Plasma Sources Science and Technology;2012-05-28
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