Modeling of cracking behavior of CrAlN coatings on silicon during micro- and nanoindentation
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Published:2024-08
Issue:
Volume:322
Page:129597
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ISSN:0254-0584
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Container-title:Materials Chemistry and Physics
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language:en
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Short-container-title:Materials Chemistry and Physics
Author:
Kharkov Maksim M.ORCID,
Xuan LitianORCID,
Tumarkin Alexander V.ORCID,
Prosolov Andrey A.,
Kabanov Gleb A.,
Kolodko Dobrynya V.ORCID,
Tarasov Boris A.,
Irmagambetova Saule M.,
Kaziev Andrey V.ORCID,
Zhang JunjieORCID