Intensive light emission from SiCN films by reactive RF magnetron sputtering
Author:
Publisher
Elsevier BV
Subject
Condensed Matter Physics,General Materials Science
Reference25 articles.
1. Mechanical and optical properties of hard SiCN coatings prepared by PECVD
2. Preparation and characterization of SiCN films
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4. Electronic properties of PLD prepared nitrogenated a-SiC thin films
5. Deposition and optical studies of silicon carbide nitride thin films
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