High-quality nano structures fabrication on organic/inorganic hybrid thin films by using UV nanoimprint lithography
Author:
Funder
National Research Foundation of Korea
Publisher
Elsevier BV
Subject
Condensed Matter Physics,General Materials Science
Reference39 articles.
1. Gold nanoparticle patterning of silicon wafers using chemical e-beam lithography;Mendes;Langmuir,2004
2. Electron beam lithography: resolution limits and applications;Vieu;Appl. Surf. Sci.,2000
3. Focused ion beam lithography for two dimensional array structures for photonic applications;Cabrini;Microelectron. Eng.,2005
4. Ion beam lithography with gold and silicon ions;Seniutinas;Appl. Phys. A,2016
5. Intense plasma discharge source at 13.5 nm for extreme-ultraviolet lithography;Klosner;Opt. Lett.,1997
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