CVD of Ru, Pt and Pt-based alloy thin films using ethanol as mild reducing agent
Author:
Publisher
Elsevier BV
Subject
Condensed Matter Physics,General Materials Science
Reference44 articles.
1. Platinum OMCVD processes and precursor chemistry
2. A Novel Study of the Growth and Resistivity of Nanocrystalline Pt Films Obtained from Pt(acac)2 in the Presence of Oxygen or Water Vapor
3. MOCVD of Platinum Films from (CH3)3CH3CpPt and Pt(acac)2: Nanostructure, Conformality, and Electrical Resistivity
4. Synthesis and Characterization of Tris(β-ketoiminato)ruthenium(III) Complexes: Potential Precursors for CVD of Ru and RuO2 Thin Films
5. Atomic Layer Deposition of Ruthenium Thin Films from Ru(thd)3 and Oxygen
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