Research on the process of fabricating a multi-layer metal micro-structure based on UV-LIGA overlay technology

Author:

Ma Yali,Liu Wenkai,Liu Chong

Publisher

AIP Publishing

Subject

Automotive Engineering

Reference12 articles.

1. Bu C, Nie WR, Luo Q, et al. Micro acceleration switch with tooth-shaped structure for long pulse sensitivity. Opt Precision Eng, 2016,11(24):2730–2737(in Chinese).

2. Huang XL, Xiong Y, Chen GY, et al. Fabrication of micro spiral acceleration switch using UV-LIGA technology.Opt Precision Eng, 2010,18(5):1152–1157(in Chinese).

3. Research on incorporate injection molding of the cover sheet and the substrate sheet for microfluidic chip;Song;Materials Science & Technology,2013

4. Ma YL, Liu WK, Liu C, et al. Application of UV-LIGA technology to machining micro-injection mold cavity of cell culture device. Opt Precision Eng, 2013, 21(5):1228–1233(in Chinese).

5. Fabrication of integrated nozzle plates for inkjet print head using microinjection process;Shen;Sensors Actuators A,2006

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