Confocal photoluminescence characterization of silicon-vacancy color centers in 4H-SiC fabricated by a femtosecond laser-Reference-Cited by-同舟云学术

Confocal photoluminescence characterization of silicon-vacancy color centers in 4H-SiC fabricated by a femtosecond laser

Published:2020-12 Issue:4 Volume:3 Page:218-228
ISSN:1672-6030
Container-title:Nanotechnology and Precision Engineering
language:en
Short-container-title:Nanotechnology and Precision Engineering

Author:

Liu Jiayu¹,Xu Zongwei¹,Song Ying¹,Wang Hong²,Dong Bing¹,Li Shaobei³,Ren Jia³,Li Qiang⁴,Rommel Mathias⁵,Gu Xinhua³,Liu Bowen⁶,Hu Minglie⁶,Fang Fengzhou¹

Affiliation:

1. State Key Laboratory of Precision Measuring Technology & Instruments, Centre of MicroNano Manufacturing Technology, Tianjin University, Tianjin 300072, China

2. State Key Laboratory of Separation Membranes and Membrane Processes, Tiangong University, Tianjin 300387, China

3. Tianjin Kaiprin Optoelectronic Technology Co., Ltd., Tianjin 300300, China

4. CAS Key Laboratory of Quantum Information, University of Science and Technology of China, Hefei 230026, China

5. Fraunhofer Institute for Integrated Systems and Device Technology (IISB), Schottkystrasse 10, Erlangen 91058, Germany

6. Ultrafast Laser Lab, Tianjin University, Tianjin 300072, China

Funder

National Natural Science Foundation of China

National Key Research and Development Program of China

State Key Laboratory of Precision Measuring Technology and Instruments

Ministry of Education of China

Ultrafast Laser Lab of Tianjin University

Publisher