Substrate temperature effects on the electrical properties of sputtered Al doped ZnO thin films
Author:
Publisher
Elsevier BV
Subject
Electrical and Electronic Engineering,Condensed Matter Physics,General Materials Science
Reference32 articles.
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1. Effect of oxygen annealing treatment on structural, optical and electrical properties of In doped ZnO thin films prepared by PLD technique;Physica B: Condensed Matter;2022-02
2. Effects of substrate temperature on thermal stability of Al-doped ZnO thin films capped by AlOx;Ceramics International;2021-03
3. Multimode AFM analysis of aluminum-doped zinc oxide thin films sputtered under various substrate temperatures for optoelectronic applications;Superlattices and Microstructures;2019-08
4. Organofunctional Silane Modification of Aluminum-Doped Zinc Oxide Surfaces as a Route to Stabilization;ACS Applied Materials & Interfaces;2017-05-12
5. Preparation and structural characterization of ZnO thin films by sol-gel method;Journal of Physics: Conference Series;2017-04-10
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