Influence of the deposition temperature on the optical and electrical properties of TiN film by spectroscopic ellipsometry

Author:

Ma Qunchao,Shi Xinwei,Bi Longtao,Li Jing,Zhou Qiang,Zhu Bailin

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Condensed Matter Physics,General Materials Science

Reference46 articles.

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2. A new type of TiN coating combining broad band visible transparency and solar control;Smith;Renew. Energy,2001

3. Christoph Schmidt and Elke Steudel, TRANSPARENT MEDIUM HAVING ANGLE-SELECTIVE TRANSMISSION OR REFLECTION PROPERTIES AND/OR ABSORPTION PROPERTIES. US20030092815 A1;Brabänder,2003

4. Electrical and optical properties of titanium nitride coatings prepared by atmospheric pressure chemical vapor deposition;Zhao;J. Non-Cryst. Solids,2008

5. Experimental study of cutting performance in machining of H13 hard steel with TiN coated tools;Du;Machine Tool & Hydraulics,2018

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