Influence of CHx thickness layer on the sensing properties of CHx/PS/Si structure against CO2 gas

Author:

Zouadi N.,Belhousse S.,Bradaî D.,Cheraga H.,Ouchabane M.,Keffous A.,Sam S.,Gabouze N.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Condensed Matter Physics,General Materials Science

Reference31 articles.

1. Properties of Porous Silicon;Canham,1997

2. Fabrication and characterisation of a new sensing device based on hydrocarbon groups (CHx) coated porous silicon;Belhousse;Sens. Actuators, B,2004

3. NO2 monitoring at room temperature by a porous silicon gas sensor;Boarino;Mater. Sci. Eng., B,2000

4. V. Mulloni, Z. Gaburro, L. Paveri, silicon microactivities as optical chemical sensors, in: Proceeding of the Porous Semiconductors Science and Technology, Madrid, Spain, 12–17 Mars 2000, p. 101.

5. Photoluminescence quenching of porous silicon in organic solvents: evidence for dielectric effects;Fellah;J. Lumin.,1999

Cited by 3 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献

1. Room temperature CO2 gas sensors of AuNPs/mesoPSi hybrid structures;Applied Nanoscience;2017-07-17

2. CO2 gas sensor based on silicon nanowires modified with metal nanoparticles;Materials Science in Semiconductor Processing;2015-10

3. CO2 detection with CNx thin films deposited on porous silicon;Materials Science in Semiconductor Processing;2015-01

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