Improvement of transparent conductive properties of Cu films by introducing H2 into deposition atmosphere during RF magnetron sputtering-Reference-Cited by-同舟云学术

登录注册会员服务联系我们

Improvement of transparent conductive properties of Cu films by introducing H2 into deposition atmosphere during RF magnetron sputtering

Published:2020-09 Issue: Volume:145 Page:106628
ISSN:0749-6036
Container-title:Superlattices and Microstructures
language:en
Short-container-title:Superlattices and Microstructures

Author:

Zhu B.L.,Yi C.H.,Zhao X.,Ma J.M.,Wu J.,Shi X.W.

Funder

Opening Project of State Key Laboratory of Materials Processing and Die & Mould Technology

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Condensed Matter Physics,General Materials Science

Reference36 articles.

1. Improved thermal stability and reliability of Cu film electrode induced by bias magnetron sputtering;Peng;Thin Solid Films,2016

2. Texture and electromigration performance in damascene interconnects formed by reflow sputtered Cu film;Abe;J. Vac. Sci. Technol. B,2004

3. Effect of spacer layer thickness on the magnetic and magnetotransport properties of Fe3O4∕Cu∕Ni80Fe20 spin valve structures;Tripathy;Phys. Rev. B,2007

4. Transparent electrodes based on ultrathin/ultra smooth Cu films produced through atomic layer deposition as new ITO-free organic light-emitting devices;Xiong;Org. Electron.,2018

5. High-performance red organic light-emitting diodes with ultrathin Cu film as anodes;Wang;Org. Electron.,2019

Cited by 4 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Nano-Sized Copper Films Prepared by Magnetron Sputtering;Journal of Structural Chemistry;2023-12

2. Influence of Target Current on Structure and Performance of Cu Films Deposited by Oscillating Pulse Magnetron Sputtering;Coatings;2022-03-16

3. Tailoring of structual, optical, and electrical properties of Cu films by sputtering power and deposition atmosphere;Journal of Vacuum Science & Technology B;2022-03

4. Effects of oxidation on the localized surface plasmon resonance of Cu nanoparticles fabricated via vacuum coating;Vacuum;2021-02

同舟云学术

1.学者识别学者识别

2.学术分析学术分析

3.人才评估人才评估

"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370

www.globalauthorid.com

TOP

Copyright © 2019-2024 北京同舟云网络信息技术有限公司
京公网安备11010802033243号京ICP备18003416号-3