1. Integrated metrology: an enabler for advanced process control (APC);Schneider,2001
2. In-line metrology for atomic resolution local height variation;Kim,2017
3. A virtual metrology system for semiconductor manufacturing;Kang;Expert Syst. Appl.,2009
4. Virtual metrology: a solution for wafer to wafer advanced process control;Chen,2005
5. Virtual metrology technique for semiconductor manufacturing;Chang;in Proc. IEEE Int. Jnt. Conf. on Neural Network Proc.,2006