Developments in the design of a spectroscopic scanning electron microscope
Author:
Publisher
Elsevier BV
Subject
Instrumentation,Nuclear and High Energy Physics
Reference11 articles.
1. Secondary electron energy analyzers for electron-beam testing
2. An annular toroidal backscattered electron energy analyser for use in scanning electron microscopy
3. A fast, parallel acquisition, electron energy analyzer: The hyperbolic field analyzer
4. An off-axis multi-channel analyzer for secondary electrons
5. A spectroscopic scanning electron microscope design
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