Insights into the effect of hollow cathode with external injection of fast ions in a sputter-type negative ion source-Reference-Cited by-同舟云学术

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Insights into the effect of hollow cathode with external injection of fast ions in a sputter-type negative ion source

Published:2023-03 Issue: Volume:1048 Page:167933
ISSN:0168-9002
Container-title:Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment
language:en
Short-container-title:Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment

Author:

Lobanov Nikolai R.^ORCID,Tunningley Thomas,Linardakis Peter^ORCID,Vvedenskaia Elena G.

Publisher

Elsevier BV

Subject

Instrumentation,Nuclear and High Energy Physics

Reference52 articles.

1. A simple negative-ion sputter source

2. Proc. Symp. North-Eastern Accelerator Personnel CONF-781051;Billen,1978

3. Proc. Symp. Northeastern Accelerator Personnel CONF-781051;Middleton,1978

4. Forty years of surface plasma source development;Dudnikov;Rev. Sci. Instrum.,2012

5. MeV Ion Implantation Systems for Production Processing of Silicon Wafers

Cited by 2 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. A Pulsed Hollow Cathode Discharge Operated in an Ar/N$$_2$$/O$$_2$$ Gas Mixture and the Formation of Nitric Oxide;Plasma Chemistry and Plasma Processing;2024-02-06

2. High-resolution grid-less retarding potential analyser and its application for sputter negative ion source;Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment;2023-05

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