Advance in a nano-accuracy surface profiler with an extended-angle test range
Author:
Publisher
Elsevier BV
Subject
Instrumentation,Nuclear and High Energy Physics
Reference17 articles.
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2. Normal tracing deflectometry using a secondary light source;Journal of Synchrotron Radiation;2017-06-14
3. Design consideration for nano-accuracy long trace profiler at BSRF;SPIE Proceedings;2014-09-17
4. Nano-accuracy measurements and the surface profiler by use of Monolithic Hollow Penta-Prism for precision mirror testing;Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment;2014-09
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