Stitching-angle measurable microscopic-interferometer: Surface-figure metrology tool for hard X-ray nanofocusing mirrors with large curvature-Reference-Cited by-同舟云学术

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Stitching-angle measurable microscopic-interferometer: Surface-figure metrology tool for hard X-ray nanofocusing mirrors with large curvature

Published:2010-05 Issue:2-3 Volume:616 Page:203-206
ISSN:0168-9002
Container-title:Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment
language:en
Short-container-title:Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment

Author:

Yumoto Hirokatsu,Mimura Hidekazu,Handa Soichiro,Kimura Takashi,Matsuyama Satoshi,Sano Yasuhisa,Ohashi Haruhiko,Yamauchi Kazuto,Ishikawa Tetsuya

Publisher

Elsevier BV

Subject

Instrumentation,Nuclear and High Energy Physics

Reference19 articles.

1. Hard X-ray Diffraction-Limited Nanofocusing with Kirkpatrick-Baez Mirrors

2. Efficient sub 100nm focusing of hard x rays

3. Short focal length Kirkpatrick-Baez mirrors for a hard x-ray nanoprobe

4. Efficient focusing of hard x rays to 25nm by a total reflection mirror

5. Hard x-ray nanoprobe based on refractive x-ray lenses

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1. Towards new generation long trace profiler LTP-2020: system design with different sensors in different operation modes;Advances in Metrology for X-Ray and EUV Optics X;2023-10-03

2. Fabrication of ultrashort sub-meter-radius x-ray mirrors using dynamic stencil deposition with figure correction;Review of Scientific Instruments;2023-04-01

3. X射线柱面反射镜的非零位干涉测量;Acta Optica Sinica;2022

4. Simulation and measurement of systematic errors of stitching interferometry for high precision X-ray mirrors with large radius of curvature;Applied Optics;2021-09-23

5. Multi-sensor optical profilometer for measurement of large freeforms at nm-level uncertainty;Surface Topography: Metrology and Properties;2020-12-01

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