Quality control and process observation for the micro assembly process-Reference-Cited by-同舟云学术

Quality control and process observation for the micro assembly process

Published:2001-07 Issue:1 Volume:30 Page:1-18
ISSN:0263-2241
Container-title:Measurement
language:en
Short-container-title:Measurement

Author:

Pfeifer Tilo,Freudenberg Reinhard,Dussler Gerd,Bröcher Benno

Publisher

Elsevier BV

Subject

Applied Mathematics,Electrical and Electronic Engineering,Condensed Matter Physics,Instrumentation

Reference21 articles.

1. NEXUS Task Force Report: Market Analysis for Microsystems 1996–2002. October 1998.

2. T. Pfeifer, R. Freudenberg, G. Dussler, G. Bröcher, The need of new devices and methods for quality control and process observation in MEMS, Proceedings of the IMEKO-XV World Congress, Vol. IX, Osaka, 1999; in: H. Imai: Measurement to Improve the Quality of Life in the 21st Century, pp. 93–96

3. Optic;Hecht,1999

4. Confocal Laser Scanning Microscopy;Sheppard,1997

5. Theory and Practise of Scanning Optical Microscopy;Wilson,1984

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