Characterization of TiAl alloy films for potential application in MEMS bimorph actuators-Reference-Cited by-同舟云学术

Characterization of TiAl alloy films for potential application in MEMS bimorph actuators

Published:2002-02 Issue:1 Volume:5 Page:35-38
ISSN:1369-8001
Container-title:Materials Science in Semiconductor Processing
language:en
Short-container-title:Materials Science in Semiconductor Processing

Author:

Qu X.X,Zhang Q.X,Zou Q.B,Balasubramanian N,Yang P,Zeng K.Y

Publisher

Elsevier BV

Subject

Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science

Reference10 articles.

1. Dhuler, Vijayakumar R, Wood, Robert L. Microelectromechanical positioning apparatus, US5962949: October 5, 1999.

2. Motamedi, Edward M, Andrews, Angus P, Park, Sangtae. Microelectro-mechanical optical resonator and method, US5903380: May 11, 1999.

3. Apte, Raj B, Paoli, Thomas L, Maeda, Patrick Y, Fisli, Tibor. Micro-positioned laser source for raster output scanners, US5854705: December 29, 1998.

4. Carr, William, Sun, Xi-qing. Multi-dimensional physical actuation of μ-structures, US5870007: February 1999.

5. Carr, William N, Sun, Xi-qing. Optical μshutter array, US5781331: July 14, 1998.

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