Reactive co-sputter deposition and properties of CrAlSiN hard films for enhancement of cutting tools
Author:
Funder
Ministry of Science and Technology of the Republic of China, Taiwan
Hwa Hsia University of Technology
Publisher
Elsevier BV
Subject
General Medicine
Reference20 articles.
1. Hard nanocomposite Ti–Cu–N films prepared by dc reactive magnetron co-sputtering;Li;Surf. Coat. Technol.,2004
2. On the behaviour of indentation fracture in TiAlSiN hard thin films;Nakonechnaa;Thin Solid Films,2004
3. A low-cost optical inspection system for rapid surface roughness measurements of CrCN hard films;Kuo;Optik,2013
4. Structural and mechanical properties of reactively sputtered TiAlC nanostructured hard coatings;Chaliyawala;Surf. Coat. Technol.,2015
5. Cutting characteristics of PVD-coated tools deposited by unbalanced magnetron sputtering method;Hosokawa;CIRP Ann.,2012
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2. Effect of silicon content on the corrosion behaviors of CrAlSiN thin films deposited by magnetron co-sputtering;Journal of Vacuum Science & Technology A;2024-01-24
3. Global optimization of process parameters for low-temperature SiNx based on orthogonal experiments;Advances in Manufacturing;2022-12-20
4. Insights and optimization of the structural and mechanical properties of TiWSiN coatings using the Taguchi method;Applied Surface Science;2021-08
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