Hard-hydrogenated tetrahedral amorphous carbon films by distributed electron cyclotron resonance plasma
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Published:2006-01
Issue:1-2
Volume:24
Page:39-48
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ISSN:0263-4368
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Container-title:International Journal of Refractory Metals and Hard Materials
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language:en
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Short-container-title:International Journal of Refractory Metals and Hard Materials
Cited by
14 articles.
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