Efficient adsorption removal of diborane impurities from recycled hydrogen during the production of polysilicon by xylitol modified activated carbon

Author:

Liang QingxinORCID,Huang Guoqiang

Funder

Tianjin University

Publisher

Elsevier BV

Reference48 articles.

1. Microstructure evolution of polycrystalline silicon by molecular dynamics simulation;Chen;AIP Adv.,2017

2. A.S. Priya, S.V. Kumar, S.K. Mathew, A.A. Kalamdani, Ieee, Design and Process control of Siemens Poly-silicon CVD Reactor, in: Conference on Power, Control, Communication and Computational Technologies for Sustainable Growth (PCCCTSG), Kurnool, INDIA, 2015, pp. 91-96.

3. Simulation optimization of energy saving in polycrystalline silicon reduction process by Siemens method;Liang;Chem. Eng. (China),2014

4. Quality analysis of polycrystalline silicon produced by modified siemens process;Cao;J. Synthetic Crystals,2013

5. Effect of 13X zeolite modified with CuCl2 and ZnCl2 for removing phosphine from circular hydrogen of a polysilicon chemical vapor deposition stove;Xu;Ind. Eng. Chem. Res.,2016

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