1. Worldwide Semiconductor Trade Statistics, “Worldwide Semiconductor Market Growth is expected to accelerate in 2021”, 2021, https://www.wsts.org/76/Recent-News-Release (accessed 17. March 2021).
2. Upcycling of waste polyethylene terephthalate plastic bottles into porous carbon for CF4 adsorption;Choi;Micropor. Mesopor. Mater.,2020
3. European semiconductor industry association. “European industry remains at forefront of greenhouse gas emissions reduction”, https://www.eusemiconductors.eu/esia/public-policy/sustainability-esh/pfc-gases. (accessed 20. August 2021).
4. Non-CO2 greenhouse gases and climate change;Montzka;Nature,2011
5. Perfluorocompounds emission reduction by the semiconductor industry;Illuzzi;J. Integr. Environ. Sci.,2010