Snap-through and pull-in analysis of an electro-dynamically actuated curved micro-beam using a nonlinear beam model

Author:

Hu Y.J.,Yang J.,Kitipornchai S.

Publisher

Elsevier BV

Subject

Mechanical Engineering,Mechanics of Materials,Acoustics and Ultrasonics,Condensed Matter Physics

Reference29 articles.

1. 1992 Static and dynamic aspects of an air-gap capacitor;Ijntema;Sensors and Actuators A-Physical,1992

2. M-TEST: A test chip for MEMS material property measurement using electrostatically actuated test structures;Osterberg;Journal of Micromechanics and Microengineering,1997

3. Pull-in voltage analysis of electrostatically actuated beam structures with fixed–fixed and fixed-free end conditions;Pamidighantam;Journal of Micromechanics and Microengineering,2002

4. Some design considerations on the electrostatically actuated microstructures;Hu;Sensors and Actuators A-Physical,2004

5. Application of the generalized differential quadrature method to the study of pull-in phenomena of MEMS switches;Sadeghian;Journal of Microelectromechanical Systems,2007

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