Subject
Mechanical Engineering,Mechanics of Materials,Acoustics and Ultrasonics,Condensed Matter Physics
Reference18 articles.
1. T.V. Roszhart, The effect of thermoelastic internal friction on the Q of micromachined silicon resonators, Proceedings of the IEEE Solid-State Sensors Actuator Workshop Fourth Technical Digest, IEEE, New York, 1990, pp. 13–16.
2. Temperature-dependent internal friction in silicon nanoelectromechanical systems;Evoy;Applied Physics Letters,2000
3. R. Abdolvand, G.K. Ho, A. Erbil, F. Ayazi, Thermoelastic damping in trench-refilled polysilicon resonators, Transducers ’03 Digest of Technical Papers, Vol. 1, June 2003, pp. 324–327.
4. Thermoelastic damping in nanomechanical resonators with finite wave speeds;Khisaeva;Journal of Thermal Stresses,2006
5. Internal friction in solids I: theory of internal friction in reeds;Zener;Physical Review,1937
Cited by
53 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献